Journal article

Local growth of sol-gel films by means of microhotplates

PZT (PbZrx Ti1-xO3) thin films have been locally grown by means of sol-gel deposition and local annealing on microhotplates. The microhotplates were based on a stress compensated Si3N4 /SiO2 membranes as structural elements and contained tantalum silicide filaments (Ta5Si3) for resistive heating. Above the filaments, a passivation layer of SiO2, an adhesion layer of Ti/TiO2 and a bottom electrode of Pt were deposited. Due to the low heat conductivity of the membrane, crystallization of the PZT film occurs exactly on the resistor filament. The formation of crystalline phase, i.e. perovskite PZT was verified by means of X-ray diffraction. A random PZT texture has been observed.


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