Journal article

Piezoelectric cantilever microphone for photoacoustic GAS detector

New micromachined pressure sensors based on PZT coated silicon cantilevers have been fabricated and integrated in a photoacoustic gas detector. PZT Sol-gel thin films texture and composition were optimized with respect to the transverse piezoelectric coefficient e(31,f). A best value of -12 C/m(2) was obtained with (100)/(001) textured thin films at the MPB composition. Optimum stress compensation between the different layers composing the cantilever has been studied in order to yield flat cantilevers. A high response of 150 mV/Pa with a S/N of 700 at 1 Pa and 1 Hz bandwidth has been measured. The influence of the damping chamber under the cantilever is also reported.

    Keywords: mems ; microphone ; cantilever ; piezoelectric


    Ledermann, N Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Siemens Bldg Technol AG Cerberus Div, CH-8708 Mannedorf, Switzerland


    Times Cited:0

    Cited References Count:7


    Record created on 2006-08-21, modified on 2017-05-10


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