Piezoelectric cantilever microphone for photoacoustic GAS detector

New micromachined pressure sensors based on PZT coated silicon cantilevers have been fabricated and integrated in a photoacoustic gas detector. PZT Sol-gel thin films texture and composition were optimized with respect to the transverse piezoelectric coefficient e(31,f). A best value of -12 C/m(2) was obtained with (100)/(001) textured thin films at the MPB composition. Optimum stress compensation between the different layers composing the cantilever has been studied in order to yield flat cantilevers. A high response of 150 mV/Pa with a S/N of 700 at 1 Pa and 1 Hz bandwidth has been measured. The influence of the damping chamber under the cantilever is also reported.


Published in:
Integrated Ferroelectrics, 35, 1-4, 1907-1914
Year:
2001
ISSN:
1058-4587
Keywords:
Note:
Ledermann, N Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Siemens Bldg Technol AG Cerberus Div, CH-8708 Mannedorf, Switzerland
411XJ
Times Cited:0
Cited References Count:7
Other identifiers:
Laboratories:




 Record created 2006-08-21, last modified 2018-01-27


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)