Ferroelectric thin films for micro-sensors and actuators: a review
This paper reviews deposition, integration. and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented.
Cite this item
Muralt, P. (2000). Ferroelectric thin films for micro-sensors and actuators: a review. Journal of Micromechanics and Microengineering, 10(2), 136–146. https://doi.org/10.1088/0960-1317/10/2/307
Click Copy to copy the citation, or select the text manually.
WOS:000087708200008
2000
10
2
136
146
Muralt, P Swiss Fed Inst Technol, EPFL, Dept Mat, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, EPFL, Dept Mat, Ceram Lab, CH-1015 Lausanne, Switzerland
325ZX
Cited References Count:97
REVIEWED
EPFL