PZT thin films for microsensors and actuators: Where do we stand?
This paper reviews deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric properties is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented. The state of the art allows some preliminary conclusions.
Keywords: chemical-vapor-deposition ; excimer laser ablation ; piezoelectric properties ; low-temperature ; electrostrictive strains ; ferroelectric ceramics ; electrical-properties ; titanate films ; pbtio3 ; growth
Muralt, P Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland
Cited References Count:117
Record created on 2006-08-21, modified on 2016-08-08