In-plane piezoelectric coefficient of PZT thin films as a function of composition
1999
Abstract
The effective piezoelectric coefficient e(31) has been measured on sol-gel processed Pb(ZrxTi1-x)O-3 thin films with Zr concentrations ranging from 45 to 60%. The largest value was observed at 45% Zr, although dielectric constant and effective d(33) peak at 53% Zr. The findings suggest that the optimal composition for microactuators and sensors is less than or equal to 45% Zr, i.e., in the tetragonal part of the phase diagram.
Details
Title
In-plane piezoelectric coefficient of PZT thin films as a function of composition
Author(s)
Muralt, P. ; Dubois, M. A. ; Seifert, A. ; Taylor, D. V. ; Ledermann, N. ; Hiboux, S.
Published in
Ferroelectrics
Volume
224
Issue
1-4
Pages
663-670
Date
1999
ISSN
0015-0193
Keywords
Note
Muralt, P Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland
222NX
Cited References Count:18
222NX
Cited References Count:18
Other identifier(s)
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Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2006-08-21