Fabrication and characterization of micromachined accelerometers based on PZT thin films
In this paper the simple accelerometers based on PZT thin films were developed and characterized. The functions of seismic mass and spring are given by a boss loaded cantilever structure. The strain of the cantilever is detected by a Pb(Zr,Ti)O-3 thin film. A 2 mm long and 0.8 mm wide cantilever yielded a response of 0.6 mV/g In the frequency interval between I and 600 Hz. With Delta f = 600Hz a limit of about 1mg* at 1Hz, and less above this frequency, was observed. The response predicted by the analytical model is close to the actual response of the device. A working miniaturized accelerometer prototype could be thus demonstrated.
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Baborowski, J Swiss Fed Inst Technol, EPFL, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, EPFL, Ceram Lab, CH-1015 Lausanne, Switzerland
Cited References Count:6
Record created on 2006-08-21, modified on 2016-08-08