Which PZT thin films for piezoelectric microactuator applications?
The effective piezoelectric coefficient e(31) has been measured on sol-gel processed Pb(ZrxTi1-x)O-3 thin films with Zr concentrations ranging from 45 to 60%. The largest value was observed at 45% Zr, although dielectric constant and effective d(33) peak at 53% Zr. The findings suggest that the optimal composition for microactuators and sensors is less than 45% Zr, i.e., in the tetragonal part of the phase diagram.
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Dubois, M. A., Muralt, P., Taylor, D. V., & Hiboux, S. (1998). Which PZT thin films for piezoelectric microactuator applications? Integrated Ferroelectrics, 22(1-4), 1055–1063. https://doi.org/10.1080/10584589808208072
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WOS:000076544300050
1998
22
1-4
1055
1063
Dubois, Ma Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland
130WX
Cited References Count:17
REVIEWED
EPFL