Which PZT thin films for piezoelectric microactuator applications?

The effective piezoelectric coefficient e(31) has been measured on sol-gel processed Pb(ZrxTi1-x)O-3 thin films with Zr concentrations ranging from 45 to 60%. The largest value was observed at 45% Zr, although dielectric constant and effective d(33) peak at 53% Zr. The findings suggest that the optimal composition for microactuators and sensors is less than 45% Zr, i.e., in the tetragonal part of the phase diagram.


Published in:
Integrated Ferroelectrics, 22, 1-4, 1055-1063
Year:
1998
ISSN:
1058-4587
Keywords:
Note:
Dubois, Ma Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland
130WX
Times Cited:0
Cited References Count:17
Laboratories:




 Record created 2006-08-21, last modified 2018-03-17


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