PZT thin film actuated elastic fin micromotor

A piezoelectric elastic fin micromotor based on a PbZr0.53Ti0.47O3 thin film driving a micromachined silicon membrane was fabricated and studied. The stator was characterized by interferometry, and a laser set-up was used to measure the angular velocity and acceleration of the motor. The torque, the output power, and the efficiency of the device were extracted from these measurements. Values up to 1020 rpm and 0.94 mu Nm were observed for the velocity and the torque, respectively, which would be sufficient for a wristwatch application. The present version exhibited an efficiency of 0.17%, which could theoretically be increased to 4.8%.


Published in:
Ieee Transactions on Ultrasonics Ferroelectrics and Frequency Control, 45, 5, 1169-1177
Year:
1998
ISSN:
0885-3010
Keywords:
Note:
Dubois, Ma Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland
129WX
Times Cited:28
Cited References Count:20
Laboratories:




 Record created 2006-08-21, last modified 2018-12-03


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