Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids
 
research article

Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids

Luginbuhl, P.
•
Collins, S. D.
•
Racine, G. A.
Show more
1997
Journal of Microelectromechanical Systems

The fabrication using silicon micromachining and characterization of an acoustic Lamb wave actuator is presented. The intended use of the device is for mass transport and sensor applications. The device consists of dual interdigitated transducers patterned on a thin-film composite membrane of silicon nitride, platinum, and a sol-gel-derived piezoelectric ceramic (PZT) thin film, The acoustic properties of the device are presented along with preliminary applications to mechanical transport and liquid delivery systems. Improved acoustic signals and improved mass transport are achieved with PZT over present Lamb wave devices utilizing ZnO or AlN as the piezoelectric transducer.

  • Details
  • Metrics
Type
research article
DOI
10.1109/84.650131
Web of Science ID

WOS:A1997YJ98800008

Author(s)
Luginbuhl, P.
Collins, S. D.
Racine, G. A.
Gretillat, M. A.
deRooij, N. F.  
Brooks, K. G.
Setter, N.  
Date Issued

1997

Published in
Journal of Microelectromechanical Systems
Volume

6

Issue

4

Start page

337

End page

346

Subjects

flexural-plate waves

•

lamb wave acoustic transducers

•

pzt sol-gel thin film

•

micropump

•

microtransport

•

microsensors

•

sensors

•

degradation

•

oscillator

•

silicon

Note

Luginbuhl, P Univ Neuchatel, Inst Microtechnol, Ch-2007 Neuchatel, Switzerland Swiss Fed Inst Technol, Lab Ceram Mx D Ecublens, Epfl, Ch-1015 Lausanne, Switzerland, Yj988, Times Cited:26, Cited References Count:36

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LC  
SAMLAB  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233312
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés