Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids

• Published in: Journal of Microelectromechanical Systems (ISSN: 1057-7157), vol. 6, num. 4, p. 337-346
• Publication date: 1997

The fabrication using silicon micromachining and characterization of an acoustic Lamb wave actuator is presented. The intended use of the device is for mass transport and sensor applications. The device consists of dual interdigitated transducers patterned on a thin-film composite membrane of silicon nitride, platinum, and a sol-gel-derived piezoelectric ceramic (PZT) thin film, The acoustic properties of the device are presented along with preliminary applications to mechanical transport and liquid delivery systems. Improved acoustic signals and improved mass transport are achieved with PZT over present Lamb wave devices utilizing ZnO or AlN as the piezoelectric transducer.

Keywords: flexural-plate waves ; lamb wave acoustic transducers ; pzt sol-gel thin film ; micropump ; microtransport ; microsensors ; sensors ; degradation ; oscillator ; silicon

Note:

Luginbuhl, P Univ Neuchatel, Inst Microtechnol, Ch-2007 Neuchatel, Switzerland Swiss Fed Inst Technol, Lab Ceram Mx D Ecublens, Epfl, Ch-1015 Lausanne, Switzerland, Yj988, Times Cited:26, Cited References Count:36

Reference

• LC-ARTICLE-1997-020
• doi:10.1109/84.650131
• View record in Web of Science

Record created on 2006-08-21, modified on 2017-05-10