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research article
Characterization of PZT thin films for micromotors
Piezoelectric membranes consisting of sputter deposited PbZrXTi1-XO3 (PZT) films on silicon diaphragms have been investigated for their resonance and piezoelectrical properties, in view of their application as stator of a micromotor. The behavior of resonance frequencies was studied as a function of membrane thickness and de-bias, in order to derive the total stress in the films and the piezoelectric coupling constant (d(31)approximate to 40 pm/V). The latter was also derived from the quasi-static deflections.
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Name
1995 Muralt ME - sputtered PZT thin films for micromotors - postprint.pdf
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Postprint
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openaccess
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625.45 KB
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Adobe PDF
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37e82d6ef84807b16f597693ac2077b0