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research article
Processing and properties of thin film pyroelectric devices
Pyroelectric PbTiO3 thin films devices with two temperature compensating elements on a SiO2/Si3N4 membranes have been fabricated and characterized. The measured voltage responsivity as a function of radiation modulation frequency has been compared to finite element model calculation. The relevant film properties have been compared for sputter and a sol-gel deposition techniques. The calculated responsivity amounts to 30 V/W. The measured pyroelectric signal is a few mu V.
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Name
1995 Kohli ME - pyroelectric PbTiO3 thin films - postprint.pdf
Type
Postprint
Access type
openaccess
Size
618.26 KB
Format
Adobe PDF
Checksum (MD5)
4053faeab2b4f4a577c29637efbf5d7a