Use of Transmission Electron-Microscopy for the Characterization of Rapid Thermally Annealed, Solution-Gel, Lead-Zirconate-Titanate Films

The microstructure and preferred orientations of rapid thermally annealed Pb(Zr0.53, Ti0.47)O3 films, deposited on Pt/Ti/SiO2/Si electrode/substrates by solution-gel spinning, have been investigated using analytical and high-resolution electron microscopy and X-ray diffraction. The temperature of pyrolysis of the PZT filMS was found to influence the preferred orientation of the film: lower temperatures (350-degrees-C) favored a (111) orientation, whereas higher temperatures (420-degrees-C) favored a (100) orientation. Excess Pb was used to control the A-site stoichiometry of the film particularly at the film surface where Pb-deficient crystals could often be observed. The absence of these crystals was shown to be correlated with an improvement in the dielectric response.


Published in:
Journal of the American Ceramic Society, 77, 5, 1209-1216
Year:
1994
ISSN:
0002-7820
Keywords:
Note:
Reaney, Im Ecole Polytech Fed Lausanne,Dept Mat,Ceram Lab,Ch-1015 Lausanne,Switzerland
Nm655
Times Cited:83
Cited References Count:18
Laboratories:




 Record created 2006-08-21, last modified 2018-03-17


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