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research article
Thin-Film Sputter Deposition for Hybrid Applications
1990
Type
research article
Authors
Publication date
1990
Published in
Volume
41
Issue
4-6
Start page
1400
End page
1402
Note
Muralt, P Balzers Ag,Proc & Equipment Labs,Ch-9496 Balzers,Switzerland
Ee547
Cited References Count:3
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
August 21, 2006
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