Integrated microfluidic devices based on low-temperature co-fired ceramic (LTCC) technology
This paper reviews recent developments in integrated fluidic mesosystems, based on low-temperature co-fired ceramic (LTCC) technology, in this laboratory and elsewhere. LTCC is shown to be an advantageous technique for integrated fluidic systems, due to its simplicity, low cost and ease of integration with other technologies and components (silicon, polymer, circuit boards. Also, the techniques utilized in making the structures are presented.
2004 Maeder LTCC fluidique.pdf
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2004 Maeder Symposium Suisse-Corée Les Diablerets - fluidique LTCC - présentation.pdf
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