Dry etching release of polymer-based cantilevers with integrated electrodes

We report here a new method to release functional SU-8 micro-cantilevers with embedded metal electrodes from the surface, based on isotropic SF6 dry etching of a poly-silicon sacrificial layer. This new fast and clean release technique allows a reproducible fabrication of SU-8 structures with integrated metal devices without risk of damage or altering their performance.


    • LMIS1-POSTER-2006-006

    Record created on 2006-06-15, modified on 2017-05-10


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