Dry etching release of polymer-based cantilevers with integrated electrodes

We report here a new method to release functional SU-8 micro-cantilevers with embedded metal electrodes from the surface, based on isotropic SF6 dry etching of a poly-silicon sacrificial layer. This new fast and clean release technique allows a reproducible fabrication of SU-8 structures with integrated metal devices without risk of damage or altering their performance.


Presented at:
International workshop on nanomechanical sensors, Copenhagen, Denmark, 7-10 May, 2006
Year:
2006
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2006-06-15, last modified 2018-03-17

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