This paper is related to the characteristics of a traveling wave ultrasonic linear motor. After a brief state of the art of this type of motor, the working principle is presented. Then, to describe analytically the phenomena existing, a theoretical model is built using wave theory and contact mechanism laws. Analytical modeling is then validated by FEM simulations. Transient and steady-state responses of the system are obtained. In function of the voltage applied to the piezoelectric ceramics, the deformation amplitude of the stator is achieved. Harmonic analysis is also performed to find out the resonance frequency of the system and thus achieve a maximal amplitude response. Different geometries and materials are simulated with the aim of obtaining the greatest deformation amplitude. The different results will then make it possible to validate the analytical model and show if the hypotheses made at the beginning match with the reality. ©2004 IEEE.