000086034 001__ 86034
000086034 005__ 20190812204928.0
000086034 037__ $$aCONF
000086034 245__ $$aSpark Assisted Chemical Engraving (SACE) machining – a versatile alternative micro-machining technology
000086034 269__ $$a2006
000086034 260__ $$c2006
000086034 336__ $$aConference Papers
000086034 6531_ $$aSACE
000086034 6531_ $$aglass micro-machining
000086034 6531_ $$amicroengineering
000086034 6531_ $$arobotics
000086034 6531_ $$a[SACE]
000086034 700__ $$aWüthrich, Rolf
000086034 700__ $$g104561$$aBleuler, Hannes$$0240027
000086034 7112_ $$d28th May - 1st June$$cBaden bei Wien, Austria$$aInternational Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN)
000086034 909C0 $$pLSRO$$0252016
000086034 909CO $$ooai:infoscience.tind.io:86034$$pconf$$pSTI
000086034 937__ $$aLSRO-CONF-2006-047
000086034 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000086034 980__ $$aCONF