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conference paper
Three-dimensional microstructuring of Pyrex glass wafers by spark-assisted chemical etching
2001
Microrobotics and Microassembly III
Type
conference paper
Web of Science ID
WOS:000174470300031
Authors
Langen, Hans
•
Fascio, Valia
•
Wüthrich, Rolf
•
Viquerat, Didier
Publication date
2001
Published in
Microrobotics and Microassembly III
Peer reviewed
REVIEWED
EPFL units
Event name | Event date |
October 29-30, 2001 | |
Available on Infoscience
June 6, 2006
Use this identifier to reference this record