Integrated Micro Hall Sensor on SU-8 Cantilever
For further miniaturization of magnetic data storage devices, instruments for exploring magnetic nanostructures are needed. Hall sensors provide a non invasive technique for quantitative magnetic field detection. In contrast to the highly sensitive semiconductor Hall sensors, bismuth and nickel Hall Sensors allow miniaturization of the sensing area down to the sub-micrometer range and therefore increased spatial resolution.
Record created on 2006-04-11, modified on 2016-08-08