MICROFABRICATED RECYCLABLE MOULDS FOR FULL-WAFER STRUCTURING OF CERAMIC PRECURSOR POLYMERS
There is growing interest for new polymer materials and their applications in Micro Electro/Mechanical Systems (MEMS). In this work, we develop recyclable micro-moulds that can be used for microstructuring of new polymer materials, such as precursors and modified or doped polymers. The moulds are made by photopolymerisation of SU8. A sacrificial layer (thickness: 500nm), of aluminum is then sputtered on the moulds. This layer is later removed to release the final structures. The moulds are filled with a liquid ceramic precursor using micropipettes, inkjet or by spin coating.
Record created on 2006-03-20, modified on 2016-08-08