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research article
Diamond-sensing microdevices for environmental control and analytical applications
For the fabrication of microdevices with line widths approaching 1 mm, a patterning methodol. was developed by the modification of an existing plasma etching process, which is suitable for any form and type of diamond. These microdevices were tested as active sensing elements for both environmental control and metrol. applications: voltammetric detection of Cl, detection of at. O for space and terrestrial applications, the measurement of UV light, and finally, conductive at. force microscopy (AFM), which is successfully performed today with microfabricated diamond tips. [on SciFinder (R)]
Type
research article
Web of Science ID
WOS:000072472600090
Authors
Haenni, W.
•
Baumann, H.
•
•
Gandini, D.
•
Niedermann, P.
•
Perret, A.
•
Skinner, N.
Publication date
1998
Published in
Volume
7
Issue
2-5
Start page
569
End page
574
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 22, 2006
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