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book part or chapter
Conducting thin films of ruthenium oxide prepared by MOCVD
Type
book part or chapter
Web of Science ID
WOS:000077430000087
Authors
Publication date
1998
Published in
Materials Research Society Symposium Proceedings
Start page
479
End page
484
Volume
514
Issue
Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 21, 2006
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