Loading...
book part or chapter
Ellipsometric investigation of metalorganic chemical vapor deposition of niobium oxide films
Type
book part or chapter
Web of Science ID
WOS:A1995BD26F00006
Authors
Publication date
1995
Published in
Materials Research Society Symposium Proceedings
Start page
45
End page
50
Volume
363
Issue
Chemical Vapor Deposition of Refractory Metals and Ceramics III
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 21, 2006
Use this identifier to reference this record