ASSESSMENT OF MICROSTENCILING TECHNIQUE FOR LOW-COST PRODUCTION OF MICROELECTRODES

Shadow mask evaporation is a powerful technique which enables us to make micro- or nano-structures on substrates which are not feasible for conventional photolithography processes, such as plastics, pre-structured substrate, biologically/chemically modified surfaces, etc. In this project, we investigated (i) the transformation of apertures of microstencil mask after several metal deposition steps, and (ii) the resolution of deposited microstructures with/without a gap between a stencil mask and a substrate. The purpose was to asses the microstenciling technique as low-cost production process of microelectrodes onto plastic substrates, which could be applied, for instance, as sensor electrodes on BioMEMS, etc.


Year:
2005
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2006-02-17, last modified 2018-03-17

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