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Abstract

Shadow mask evaporation is a powerful technique which enables us to make micro- or nano-structures on substrates which are not feasible for conventional photolithography processes, such as plastics, pre-structured substrate, biologically/chemically modified surfaces, etc. In this project, we investigated (i) the transformation of apertures of microstencil mask after several metal deposition steps, and (ii) the resolution of deposited microstructures with/without a gap between a stencil mask and a substrate. The purpose was to asses the microstenciling technique as low-cost production process of microelectrodes onto plastic substrates, which could be applied, for instance, as sensor electrodes on BioMEMS, etc.

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