Infoscience

Report

ASSESSMENT OF MICROSTENCILING TECHNIQUE FOR LOW-COST PRODUCTION OF MICROELECTRODES

Shadow mask evaporation is a powerful technique which enables us to make micro- or nano-structures on substrates which are not feasible for conventional photolithography processes, such as plastics, pre-structured substrate, biologically/chemically modified surfaces, etc. In this project, we investigated (i) the transformation of apertures of microstencil mask after several metal deposition steps, and (ii) the resolution of deposited microstructures with/without a gap between a stencil mask and a substrate. The purpose was to asses the microstenciling technique as low-cost production process of microelectrodes onto plastic substrates, which could be applied, for instance, as sensor electrodes on BioMEMS, etc.

    Reference

    • LMIS1-REPORT-2006-009

    Record created on 2006-02-17, modified on 2016-08-08

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