In this paper we present our latest developments in high precision positioning and handling systems operating inside an SEM. The Laboratory in Scanning Electron Microscope concept (LAB-in-SEM) is proposed along with a description of our piezodriven manipulators. Nano-material testing such as in-situ indentation and scratch have been conduct with our systems and are briefly related here. Finally, the preliminary tests of the tele-operated assembly of carbon nanotubes on AFM tips are described.These results will permit the development of an automatic nanotubes assembly system.
Type
conference paper
Authors
Publication date
2004
Published in
4th International Workshop on Microfactories
Volume
1
Start page
17
End page
22
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Shanghai, China | October 2004 | |
Available on Infoscience
February 2, 2006
Use this identifier to reference this record