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conference paper
“Pocket Factory”: Concept of miniaturized modular cleanrooms
2005
not yet published!!
The manipulation and assembly of microsystems (MEMS) require accurate robots operating in a clean room environment. Available systems are bulky, thus requiring large ground surface for small components. Furthermore they have limited accuracy. The main objective of the 'Pocket-factory' project is to develop miniaturized and modular clean production units for microsystems and establish a methodology to quickly set them up
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Name
TMMF05-pocketfactory.pdf
Access type
openaccess
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813.33 KB
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Adobe PDF
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