Recent developments and advances in micro-electro-mechanical systems for nanometer-scale applications such as scanning force microscopy are presented. The microfabrication of tools so small that they enable access to the nanoworid, such as tips, flexible cantilevers, integrated deflection sensors and nanoactuators will be described. Bulk and surface micromachining of mono or polycrystalline silicon, extended by aligned-wafer-bonding, etch-back and sacrificial-iayer-etching steps are major fabrication steps used. Experiments on prototypes show that these devices are promising for use as ultra-sensitive stand-alone local probe micro-instruments.