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research article
Micromachined silicon cantilevers and tips for bidirectional force microscopy
1992
A monocrystalline silicon lever with an integrated silicon tip for a force/friction microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.
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Buser_1992_UM.pdf
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