Micromachined silicon cantilevers and tips for bidirectional force microscopy

A monocrystalline silicon lever with an integrated silicon tip for a force/friction microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.


Published in:
Ultramicroscopy, 42-44, 1476-1480
Year:
1992
Laboratories:




 Record created 2005-11-02, last modified 2018-03-18

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