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research article
Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy
A monocrystalline silicon lever with an integrated silicon tip for a Force/Friction Microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.
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Buser_1991_MicroEng.pdf
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openaccess
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189.07 KB
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Adobe PDF
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