Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy

A monocrystalline silicon lever with an integrated silicon tip for a Force/Friction Microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.


Published in:
Microelectronic Engineering, 15, 1-4, 407-410
Year:
1991
Keywords:
Note:
54
Laboratories:




 Record created 2005-11-02, last modified 2018-03-18

n/a:
Download fulltext
PDF

Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)