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semester or other student projects
Fabrication and characterization of metal nanolevers made by shadow mask technology
Grogg, Daniel
2004
Evaporation through shadow masks (nanostencils) overcomes the limitations typically given by patterning methods involving conventional optical lithography and etching, such as diffraction limits and etch-selectivity. This paper demonstrates the fabrication of metal cantilevers with sub-micron dimensions using direct evaporation through miniature nanostencils, followed by dry etching to release metal nanolevers from substrate.
Type
semester or other student projects
Authors
Grogg, Daniel
Publication date
2004
EPFL units
Available on Infoscience
November 2, 2005
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