Fabrication and characterization of metal nanolevers made by shadow mask technology

Evaporation through shadow masks (nanostencils) overcomes the limitations typically given by patterning methods involving conventional optical lithography and etching, such as diffraction limits and etch-selectivity. This paper demonstrates the fabrication of metal cantilevers with sub-micron dimensions using direct evaporation through miniature nanostencils, followed by dry etching to release metal nanolevers from substrate.


Year:
2004
Laboratories:




 Record created 2005-11-02, last modified 2018-03-17


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