Infoscience

Book Chapter

Nanofabrication by shadow deposition through nanostencils

Brugger, J; Kim, G
  • Published in: Nanolithography and patterning techniques in microelectronics, p. 218-237
  • Series: Woodhead Publishing in Materials
  • Cambridge: Woodhead Publishing Limited, 2005

    Reference

    • LMIS1-CHAPTER-2005-001

    Record created on 2005-11-02, modified on 2017-05-10

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