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Nanofabrication by shadow deposition through nanostencils

Brugger, J ; Kim, G

Published in:
Nanolithography and patterning techniques in microelectronics, 218-237
Year:
2005
Publisher:
Cambridge, Woodhead Publishing Limited
Laboratories:
LMIS1

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Book chapters
Published



 Record created 2005-11-02, last modified 2018-03-17


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