Oblique Powder Blasting for Three-dimensional Micromachining of Brittle Materials
2000
Details
Title
Oblique Powder Blasting for Three-dimensional Micromachining of Brittle Materials
Author(s)
Belloy, E. ; Sayah, A. ; Gijs, M. A. M.
Conference
Proceed. Eurosensors XIV, the 14th European Conference on Solid-State Transducers, Copenhagen, Denmark, August 27-30
Date
2000
Laboratories
LMIS2
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS2 - Microsystems Laboratory 2
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2005-10-26