Micro-replication of Optical Lenses in Glass using Sol Gel Technology

A new method to realize arrays of micro-lenses using a sol gel glass replication technology is presented. Polydimethyl-siloxane (PDMS) master structures are used for the replication of thin glass membranes, which, by an appropriate annealing procedure, result in converging lenses with positive meniscus. Hereby, we exploit PDMS - sol gel surface interactions and thickness dependent changes in composition of the sol gel solution. The lenses are realized on a circular and square like basis. We characterize the micro-lenses by an optical imaging system and measure their focal length as a function of lens thickness and size. Also spherical aberration effects are measured.


Presented at:
MEMS 2002, 15th International IEEE Micro Electro Mechanical Conference, Las Vegas, Nevada, USA, 20-24 january
Year:
2002
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 Record created 2005-10-26, last modified 2018-01-27

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