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research article
Microfabrication of high-aspect ratio and complex monolithic structures in glass
Type
research article
Web of Science ID
WOS:000178451900015
Authors
Publication date
2002
Published in
Volume
11
Start page
521
End page
527
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 26, 2005
Use this identifier to reference this record