Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Micromachining of glass inertial sensors
 
research article

Micromachining of glass inertial sensors

Belloy, E.
•
Sayah, A.  
•
Gijs, M.A.M.  
2002
Journal of Microelectromechanical Systems
  • Details
  • Metrics
Type
research article
DOI
10.1109/84.982867
Web of Science ID

WOS:000173751000011

Author(s)
Belloy, E.
Sayah, A.  
Gijs, M.A.M.  
Date Issued

2002

Published in
Journal of Microelectromechanical Systems
Volume

11

Start page

85

End page

90

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS2  
Available on Infoscience
October 26, 2005
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/218341
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés