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Micromachining of glass inertial sensors

Belloy, E. ; Sayah, A. ; Gijs, M.A.M.

Published in:
J. Microelectromechanical Systems, 11, 85-90
Year:
2002
DOI:
10.1109/84.982867
Other identifiers:
View record in Web of Science
Laboratories:
LMIS2

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LMIS2 - Microsystems Laboratory 2
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published



 Record created 2005-10-26, last modified 2018-03-17


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