Micromachining of glass inertial sensors
Belloy, E.; Sayah, A.; Gijs, M.A.M.
2002

Details

Title Micromachining of glass inertial sensors
Author(s) Belloy, E. ; Sayah, A. ; Gijs, M.A.M.
Published in Journal of Microelectromechanical Systems
Volume 11
Pages 85-90
Date 2002
DOI 10.1109/84.982867
Other identifier(s) View record in Web of Science
Laboratories LMIS2
Record Appears in Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LMIS2 - Microsystems Laboratory 2
Peer-reviewed publications
Work produced at EPFL
Journal Articles
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