research article
Micromachining of glass inertial sensors
Type
research article
Web of Science ID
WOS:000173751000011
Author(s)
Date Issued
2002
Published in
Volume
11
Start page
85
End page
90
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 26, 2005
Use this identifier to reference this record