Micromachining of glass inertial sensors

• Published in: J. Microelectromechanical Systems, vol. 11, p. 85-90
• Publication date: 2002

Reference

• LMIS2-ARTICLE-2002-002
• doi:10.1109/84.982867
• View record in Web of Science

Record created on 2005-10-26, modified on 2017-05-10