Powder blasting patterning technology for microfabrication of complex suspended structures in glass
2003
Details
Title
Powder blasting patterning technology for microfabrication of complex suspended structures in glass
Author(s)
Pawlowski, A.-G. ; Belloy, E. ; Sayah, A. ; Gijs, M.A.M.
Published in
Microelectronic Engineering
Volume
67-68
Pages
557-565
Date
2003
Laboratories
LMIS2
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS2 - Microsystems Laboratory 2
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2005-10-26