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conference paper
Diffractive optical elements in titanium oxide for MOEMS applications
2003
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers
Type
conference paper
Web of Science ID
WOS:000184567300372
Authors
Publication date
2003
Published in
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers
Volume
2
Start page
1482
End page
1485
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Boston, USA | June 8-12, 2003 | |
Available on Infoscience
October 26, 2005
Use this identifier to reference this record