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research article
Accurate masking technology for high-resolution powder blasting
We have combined eroding 10 µm diameter Al2O3 particles with a new masking technology to realize the smallest and most accurate possible structures by powder blasting. Our masking technology is based on the sequential combination of two polymers:(i) the brittle epoxy resin SU8 for its photosensitivity and (ii) the elastic and thermocurable poly-dimethylsiloxane for its large erosion resistance. We have micropatterned various types of structures with a minimum width of 20 µm for test structures with an aspect ratio of 1, and 50 µm for test structures with an aspect ratio of 2.
Type
research article
Web of Science ID
WOS:000230714900010
Authors
Publication date
2005
Published in
Volume
15
Issue
7
Start page
S60
End page
S64
Subjects
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 26, 2005
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