Accurate masking technology for high-resolution powder blasting

We have combined eroding 10 µm diameter Al2O3 particles with a new masking technology to realize the smallest and most accurate possible structures by powder blasting. Our masking technology is based on the sequential combination of two polymers:(i) the brittle epoxy resin SU8 for its photosensitivity and (ii) the elastic and thermocurable poly-dimethylsiloxane for its large erosion resistance. We have micropatterned various types of structures with a minimum width of 20 µm for test structures with an aspect ratio of 1, and 50 µm for test structures with an aspect ratio of 2.


Published in:
J. Micromech. Microeng., 15, 7, S60-S64
Year:
2005
Keywords:
Laboratories:




 Record created 2005-10-26, last modified 2018-01-27


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)