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conference paper
Fabrication process for a microfluidic valve
2003
Proceedings of the 2003 International Symposium on Circuits and Systems (ISCAS 2003)
In this paper, the necessity for a high pressure valve is discussed, and a design for such a valve that has been previously presented is described. This valve can be built using simple fabrication techniques available in microsystem foundries. Its fabrication process is also shown. Finally, a brief description of the expected behaviour of the valve is presented.
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Name
2003_ISCAS_Valve.mdi
Access type
restricted
Size
445.98 KB
Format
Unknown
Checksum (MD5)
e3a4e21f1e2226f4915080f8230dbdc5