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conference paper
Fabrication process and model for a MEMS parallel-plate capacitor above CPW line
2004
MEMSWAVE 2004, 5th workshop on MEMS for millimeterwave communication
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Name
2004_MEMSWAVE_Capacitors.pdf
Access type
restricted
Size
390.58 KB
Format
Adobe PDF
Checksum (MD5)
4fd48b465e0166547190f2e70f08433b