Position Feedback for Microrobots based on Scanning Probe Microscopy

• Presented at: IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2004), Sendai, Japan, 28 Sept.-2 Oct. 2004
• Published in: Proceedings of the IEEE/RSJ International Conference on Intelligent Robots and Systems, vol. 2, p. 1734 - 1739
• Publication date: 2004

A cluster of small cooperative robots capable of executing measurement and manipulation tasks is being developed within the scope of a European project. The robots are autonomous and have an overall dimension in the order of 1 cm/sup 3/. In this paper we present the concept of the robots, along with possible locomotion modules based on piezoelectric stick-slip actuators. Tools can be added to the robot for different measurements and manipulations. The integration of an AFM probe on the robot has been realized as a high resolution sensor for localization purposes and for measurements. First experimental results are shown.

Keywords: [HPR-MR] ; robotics ; microengineering ; micro robotics ; mobile micro robot ; AFM scanner ; positioning ; piezoelectric actuators ; stick-slip actuators

Reference

• LSRO2-CONF-2005-003

Record created on 2005-10-13, modified on 2017-05-10