Conference paper

Passive micro-flow regulator for drug delivery system

In this paper an innovative micromachined passive flow regulator for implantable drug delivery systems is presented. The aim is to passively achieve a constant flow rate over a certain pressure range through linear variation of a flow resistance. This flow regulator is based on bending membrane contact with a micromachined substrate. A first serie of samples has been realized using standard Silicon micromachining. For better biochemical performances, a second version of the device has been manufactured in Titanium using a combination of micromachining and conventional machining. Test results show a DI water flow regulation of 6 nanoliters per second over a pressure range between 100 mbar and 600 mbar.


    • LMIS4-CONF-1998-010

    Record created on 2005-09-13, modified on 2017-05-10


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