High aspect ratio planar coils embedded in SU8 photoepoxy for MEMS applications
Planar micromachined spiral inductive structures have applications in many areas such as microelectronics components (filters, low-power components, etc), or such as sensors (proximity sensors) and actuators (electromagnetic micromotors, micropumps, microrelays:, etc). The fabrication of such devices is however rather complicated. In this work we present a new way to realize planar microcoils by using the high-aspect ratio SU8 photoepoxy. Small microinductors with inductances of 0.1 mu H (no magnetic core used) have been achieved. They can be used as self-alone devices or be directly realized on integrated circuits with low-temperature (< 100 degrees C) postprocessing fabrication steps.
1998
SENSORS SERIES
1
11
14
REVIEWED
Event name | Event place | Event date |
SOUTHAMPTON, ENGLAND | SEP 13-16, 1998 | |