Infoscience

Conference paper

High aspect ratio planar coils embedded in SU8 photoepoxy for MEMS applications

Planar micromachined spiral inductive structures have applications in many areas such as microelectronics components (filters, low-power components, etc), or such as sensors (proximity sensors) and actuators (electromagnetic micromotors, micropumps, microrelays:, etc). The fabrication of such devices is however rather complicated. In this work we present a new way to realize planar microcoils by using the high-aspect ratio SU8 photoepoxy. Small microinductors with inductances of 0.1 mu H (no magnetic core used) have been achieved. They can be used as self-alone devices or be directly realized on integrated circuits with low-temperature (< 100 degrees C) postprocessing fabrication steps.

    Reference

    • LMIS4-CONF-1998-009

    Record created on 2005-09-13, modified on 2016-08-08

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