High aspect ratio planar coils embedded in SU8 photoepoxy for MEMS applications

Planar micromachined spiral inductive structures have applications in many areas such as microelectronics components (filters, low-power components, etc), or such as sensors (proximity sensors) and actuators (electromagnetic micromotors, micropumps, microrelays:, etc). The fabrication of such devices is however rather complicated. In this work we present a new way to realize planar microcoils by using the high-aspect ratio SU8 photoepoxy. Small microinductors with inductances of 0.1 mu H (no magnetic core used) have been achieved. They can be used as self-alone devices or be directly realized on integrated circuits with low-temperature (< 100 degrees C) postprocessing fabrication steps.


Published in:
EUROSENSORS XII, VOLS 1 AND 2, 1, 11-14
Presented at:
12th European Conference on Solid-State Transducers - 9th UK Conference on Sensors and Their Applications, SOUTHAMPTON, ENGLAND, SEP 13-16, 1998
Year:
1998
Laboratories:




 Record created 2005-09-13, last modified 2018-03-17


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