Design and simulation of a silicon microfabricated photoacoustic gas sensor

We present the modeling and simulation of a photoacoustic sensor. Starting from detailed simulations of the microsystem components, i.e, the IR-source, the cavity, and the microphone, we present a global simulation of the detector. The temperature profile in the photoacoustic cavity has been studied. Analytical key design rules for optimization of the detector's performance are discussed.


Publié dans:
MICROSIM II - SIMULATION AND DESIGN OF MICROSYSTEMS AND MICROSTRUCTURES, 1, 117-126
Présenté à:
2nd International Conference on the Simulation and Design of Microsystems and Microstructures (MICROSIM 97), LAUSANNE, SWITZERLAND, SEP, 1997
Année
1998
Laboratoires:




 Notice créée le 2005-09-13, modifiée le 2020-07-30


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