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conference paper
Design and simulation of a silicon microfabricated photoacoustic gas sensor
1998
MICROSIM II - SIMULATION AND DESIGN OF MICROSYSTEMS AND MICROSTRUCTURES
We present the modeling and simulation of a photoacoustic sensor. Starting from detailed simulations of the microsystem components, i.e, the IR-source, the cavity, and the microphone, we present a global simulation of the detector. The temperature profile in the photoacoustic cavity has been studied. Analytical key design rules for optimization of the detector's performance are discussed.
Type
conference paper
Authors
Publication date
1998
Published in
MICROSIM II - SIMULATION AND DESIGN OF MICROSYSTEMS AND MICROSTRUCTURES
Volume
1
Start page
117
End page
126
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
LAUSANNE, SWITZERLAND | SEP, 1997 | |
Available on Infoscience
September 13, 2005
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