Design and simulation of a silicon microfabricated photoacoustic gas sensor
We present the modeling and simulation of a photoacoustic sensor. Starting from detailed simulations of the microsystem components, i.e, the IR-source, the cavity, and the microphone, we present a global simulation of the detector. The temperature profile in the photoacoustic cavity has been studied. Analytical key design rules for optimization of the detector's performance are discussed.
Record created on 2005-09-13, modified on 2016-08-08