Conference paper

Design and simulation of a silicon microfabricated photoacoustic gas sensor

We present the modeling and simulation of a photoacoustic sensor. Starting from detailed simulations of the microsystem components, i.e, the IR-source, the cavity, and the microphone, we present a global simulation of the detector. The temperature profile in the photoacoustic cavity has been studied. Analytical key design rules for optimization of the detector's performance are discussed.


    • LMIS4-CONF-1998-002

    Record created on 2005-09-13, modified on 2016-08-08


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